• Water oxygen content: <0.8 PPM

• Purification capacity: deoxygenate 80 L, remove water 3 kg.

• Purification valve: fully automatic electro-pneumatic valve.

• Filter: high-efficiency filter with 0.3 micron pore size filter that meets HEPA standards.

• Regeneration: used for re-use of the purification system to activate it; regeneration requires a mixture of N₂/H₂ or Ar/H₂, of which H₂ accounts for 5-10%

• Size: Maximum <1x2m, substrate stage size can be customized

• Vacuum limit: Better than 5.0x10^-5Pa (glove box environment)

   Pumping speed: atmospheric pressure ~5x10^-4Pa<25min (glove box environment)

• Sputtering target: rectangular target gun, customized according to needs

• Power supply: Equipped with 600w RF power supply and 2kw high-performance DC pulse power supply

• Film thickness uniformity: high film thickness uniformity

• Sputtering materials: ITO, IZ0, IWO, etc.

• Provide high-end vacuum coating equipment with quality, standardization and scale.

• Adopt high-integration design to realize the integration of control, production, import and export.

• Strong intelligence, the operating system is embedded with misoperation interlock program to avoid operating errors.

• Short cooling period, fast recovery of working vacuum, the atmosphere in the box reaches 5.0X10-4Pa<15 minutes.

• High adaptability, can realize the evaporation of various metal materials.

• Many models, covering the full range from scientific research experiments-product pilot-mass production

• Can be customized according to customer needs.

• Chamber size: Maximum <1x2m, customizable

• Pumping speed: Atmospheric pressure ~10 Pa <5 s